PMX matcher	4 channel phase shifter	ESC power supply	ESC power supply for Lam TCP (Compatible item)
Control rack for an epi equipment

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Multi channel phase shifter

4 channel phase shifter	4 channel phase shifter (without display)

Closed Loop method

It detects the matching network’s output phase then feedbacks to the phase control circuit, and makes and controls the phase difference and standard signals into the random values.

Power supply voltage

Single AC 100 ~ 240 (free power supply) 20/60Hz

Size

99 (height) X 483mm (width) X 450mm (length) : able to place into a rack.

Phase control range

0 ~ 360 degree each channels individual settings

Phase setting method

Set by rotation knob on the front panel

Control method

Open loop method/Closed loop metho

Control method

13.56MHz. Based on the power input from the RF power supply´s external frequency.

Phase input signal

Voltage phase signal which from the power output via the attenuator.

Display

Phase difference display：	20 figures, 4 lines with English and number display (option)
Phase lock display：	LED lamp (green) for each channels
Phase display range：	0 ~ 360 degrees
Phase display resolution：	1 degree
Phase display measurement：	+/- 0.5% of the measured value, +/- 1digit