PMX matcher |
4 channel phase shifter |
ESC power supply |
ESC power supply for Lam TCP |
Control rack for an epi equipment |
We make wide variety items for your custom needs. Please contact our sales agents for any inquires.
4 channel phase shifter |
4 channel phase shifter |
It detects the matching network’s output phase then feedbacks to the phase control circuit, and makes and controls the phase difference and standard signals into the random values.
Phase difference display: | 20 figures, 4 lines with English and number display (option) |
Phase lock display: | LED lamp (green) for each channels |
Phase display range: | 0 ~ 360 degrees |
Phase display resolution: | 1 degree |
Phase display measurement: | +/- 0.5% of the measured value, +/- 1digit |
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